Handbook of plasma processing technology. Fundamentals, etching, deposition, and surface interaction

Handbook of plasma processing technology. Fundamentals, etching, deposition, and surface interaction This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Authors: Rossnagel S.M., Cuomo J.J., Westwood W.D.Pages: 535     Year: 1990

Tags: surface etching interaction handbook fundamentals processing deposition technology. plasma
   

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